Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160091 | CMP polishing head design for improving removal rate uniformity | Te-Chien Hou, Ching-Hong Jiang, Kuo-Yin Lin, Ming-Shiuan She, Shen-Nan Lee +1 more | 2018-12-25 |
| 10144109 | Polisher, polishing tool, and polishing method | Teng-Chun Tsai, Shen-Nan Lee, Chia-Chiung Lo, Shwang-Ming Jeng, Yee-Chia Yeo | 2018-12-04 |
| 9987720 | Method for operating a polishing head and method for polishing a substrate | Shich-Chang Suen, Chin-Hsiang Chan, Liang-Guang Chen | 2018-06-05 |
| 9962801 | Systems and methods for performing chemical mechanical planarization | Shen-Nan Lee, Teng-Chun Tsai | 2018-05-08 |
| 9954069 | Semiconductor device and method of forming vertical structure | Chih-Tang Peng, Tai-Chun Huang, Teng-Chun Tsai, Cheng-Tung Lin, De-Fang Chen +4 more | 2018-04-24 |
| 9917017 | Replacement gate process for semiconductor devices | Yu-Jen Shen, Ying-Ho Chen | 2018-03-13 |