Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160088 | Advanced polishing system | Che-Liang Chung, Chun-Kai Tai, Wei-Chen Hsiao | 2018-12-25 |
| 10164053 | Semiconductor device and method | Che-Liang Chung, Chi-Te Huang, Kei-Wei Chen | 2018-12-25 |
| 9987720 | Method for operating a polishing head and method for polishing a substrate | Chin-Hsiang Chan, Liang-Guang Chen, Yung-Cheng Lu | 2018-06-05 |
| 9917173 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Liang-Guang Chen | 2018-03-13 |