Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160091 | CMP polishing head design for improving removal rate uniformity | Te-Chien Hou, Ching-Hong Jiang, Ming-Shiuan She, Shen-Nan Lee, Teng-Chun Tsai +1 more | 2018-12-25 |
| 10164102 | Method and structure for FinFET devices | Teng-Chun Tsai, Po-Yu Lin | 2018-12-25 |
| 9954105 | Method and structure for FinFET devices | Teng-Chun Tsai, Po-Yu Lin | 2018-04-24 |
| 9937536 | Air purge cleaning for semiconductor polishing apparatus | Chih-I Peng, Kun-Tai Wu, Teng-Chun Tsai, Hsiang-Pi Chang, Cary Chia-Chiung Lo | 2018-04-10 |