Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162276 | Apparatus for shielding reticle | Chue-San Yoo, Tsiao-Chen Wu | 2018-12-25 |
| 10126666 | Apparatus and a method of forming a particle shield | Chue-San Yoo, Ching-Yueh Chen | 2018-11-13 |
| 10102615 | Method and system for detecting hotspots in semiconductor wafer | Peng Chen, Chih-Chiang Tu | 2018-10-16 |
| 10025175 | Method and system to prepare, manufacture and inspect mask patterns for a semiconductor device | Chi-Ming Tsai, Chih-Chiang Tu, Ru-Gun Liu, Shuo-Yen Chou | 2018-07-17 |
| 9907117 | Heating device and biochemical reactor having the same | Chen Su, Hsiao-Fen Chang, Pei-Yu Li, Yun-Lung Tsai, Ching-Ko Lin +1 more | 2018-02-27 |