Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083270 | Target optimization method for improving lithography printability | Shih-Ming Chang, Ken-Hsien Hsieh, Ru-Gun Liu | 2018-09-25 |
| 10025175 | Method and system to prepare, manufacture and inspect mask patterns for a semiconductor device | Chi-Ming Tsai, Chih-Chiang Tu, Wen-Hao Cheng, Ru-Gun Liu | 2018-07-17 |
| 9990460 | Source beam optimization method for improving lithography printability | Hsu-Ting Huang, Ru-Gun Liu | 2018-06-05 |