Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163634 | Method for forming conductive lines | Yung-Sung Yen, Ru-Gun Liu | 2018-12-25 |
| 10083270 | Target optimization method for improving lithography printability | Shih-Ming Chang, Shuo-Yen Chou, Ru-Gun Liu | 2018-09-25 |
| 10078718 | Multiple patterning method for semiconductor devices | Chih-Ming Lai, Ru-Gun Liu, Wen-Chun Huang, Wen-Li Cheng, Pai-Wei Wan | 2018-09-18 |
| 10032664 | Methods for patterning a target layer through fosse trenches using reverse sacrificial spacer lithography | Shih-Ming Chang, Chih-Ming Lai, Ming-Feng Shieh, Ru-Gun Liu, Tsai-Sheng Gau | 2018-07-24 |
| 9984876 | Lithographic technique for feature cut by line-end shrink | Yung-Sung Yen, Chun-Kuang Chen, Ko-Bin Kao, Ru-Gun Liu | 2018-05-29 |