MS

Ming-Feng Shieh

TSMC: 13 patents #97 of 2,904Top 4%
Overall (2018): #3,675 of 503,207Top 1%
13
Patents 2018

Issued Patents 2018

Showing 1–13 of 13 patents

Patent #TitleCo-InventorsDate
10163885 Systems and methods for a sequential spacer scheme Shih-Ming Chang, Ru-Gun Liu, Tsai-Sheng Gau 2018-12-25
10153166 Mechanisms for forming patterns using lithography processes Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau 2018-12-11
10115796 Method of pulling-back sidewall metal layer Jin-Dah Chen, Han-Wei Wu 2018-10-30
10096519 Method of making a FinFET device Wen-Hung Tseng, Tzung-Hua Lin, Hung-Chang Hsieh 2018-10-09
10048590 Method and apparatus of patterning a semiconductor device Chien-Wei Wang, Ching-Yu Chang 2018-08-14
10049885 Method for patterning a plurality of features for fin-like field-effect transistor (FinFET) devices Hoi-Tou Ng, Kuei-Liang Lu, Ru-Gun Liu 2018-08-14
10049919 Semiconductor device including a target integrated circuit pattern Chieh-Han Wu, Cheng-Hsiung Tsai, Chung-Ju Lee, Ru-Gun Liu, Shau-Lin Shue +1 more 2018-08-14
10043759 Overlay mark Chen Chen, Ching-Yu Chang 2018-08-07
10032664 Methods for patterning a target layer through fosse trenches using reverse sacrificial spacer lithography Shih-Ming Chang, Ken-Hsien Hsieh, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau 2018-07-24
10014175 Lithography using high selectivity spacers for pitch reduction Yu-Sheng Chang, Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Hsiang-Huan Lee +5 more 2018-07-03
9929153 Method of making a FinFET device Weng-Hung Tseng, Tzung-Hua Lin, Hung-Chang Hsieh 2018-03-27
9917192 Structure and method for transistors with line end extension Shao-Ming Yu, Chang-Yun Chang, Chih-Hao Chang, Hsin-Chih Chen, Kai-Tai Chang +2 more 2018-03-13
9904163 Cut-mask patterning process for FIN-like field effect transistor (FINFET) device Wei-De Ho, Ching-Yu Chang, Kuei-Liang Lu 2018-02-27