Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121698 | Method of manufacturing a semiconductor device | Shau-Lin Shue, Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more | 2018-11-06 |
| 10020259 | Copper etching integration scheme | Chih Wei Lu, Chung-Ju Lee, Tien-I Bao | 2018-07-10 |
| 10014175 | Lithography using high selectivity spacers for pitch reduction | Yu-Sheng Chang, Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Ming-Feng Shieh +5 more | 2018-07-03 |
| 9947583 | Method of semiconductor integrated circuit fabrication | Ching-Fu Yeh, Chao-Hsien Peng, Hsien-Chang Wu | 2018-04-17 |
| 9892933 | Lithography using multilayer spacer for reduced spacer footing | Chao-Hsien Peng, Shau-Lin Shue | 2018-02-13 |