Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036951 | Pellicle assembly and fabrication methods thereof | Chih-Cheng Lin, Hsin-Chang Lee, Ta-Cheng Lien, Anthony Yen | 2018-07-31 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2018-06-19 |
| 9897910 | Treating a capping layer of a mask | Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2018-02-20 |
| 9857679 | Lithography mask and fabricating the same | Ta-Cheng Lien, Tzu-Ling Liu | 2018-01-02 |