Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162258 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Chih-Cheng Lin, Yao-Ching Ku, Wei-Jen Lo +3 more | 2018-12-25 |
| 10036951 | Pellicle assembly and fabrication methods thereof | Pei-Cheng Hsu, Chih-Cheng Lin, Ta-Cheng Lien, Anthony Yen | 2018-07-31 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai +3 more | 2018-07-03 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Pei-Cheng Hsu, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2018-06-19 |
| 9995999 | Lithography mask | Yun-Yue Lin, Chia-Jen Chen, Anthony Yen | 2018-06-12 |
| 9897910 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Anthony Yen | 2018-02-20 |
| 9869928 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Tao Huang, Chih-Tsung Shih, Chia-Jen Chen, Anthony Yen | 2018-01-16 |