Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061191 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chi-Lun Lu, Ching-Wei Shen, Jeng-Horng Chen | 2018-08-28 |
| 10031411 | Pellicle for EUV mask and fabrication thereof | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2018-07-24 |
| 10007174 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2018-06-26 |
| 9995683 | Apparatus for single-molecule detection | Chung-Fan Chiou, Rung-Ywan Tsai, Yu-Tang Li, Ming-Chia Li, Chang-Sheng Chu +3 more | 2018-06-12 |
| 9886543 | Method providing for asymmetric pupil configuration for an extreme ultraviolet lithography process | Chia-Chun Chung, Norman Chen, Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen | 2018-02-06 |
| 9869928 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Tao Huang, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2018-01-16 |