Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156784 | Systems and methods of EUV mask cleaning | Chi-Lun Lu, Kuan-Wen Lin | 2018-12-18 |
| 10061191 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chi-Lun Lu, Chih-Tsung Shih, Jeng-Horng Chen | 2018-08-28 |
| 9885952 | Systems and methods of EUV mask cleaning | Chi-Lun Lu, Kuan-Wen Lin | 2018-02-06 |