Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156784 | Systems and methods of EUV mask cleaning | Ching-Wei Shen, Kuan-Wen Lin | 2018-12-18 |
| 10067418 | Particle removal system and method thereof | Shu-Hao Chang, Shang-Chieh Chien, Ming-Chin Chien, Jui-Ching Wu, Jeng-Horng Chen +2 more | 2018-09-04 |
| 10061191 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chih-Tsung Shih, Ching-Wei Shen, Jeng-Horng Chen | 2018-08-28 |
| 9889477 | Method and apparatus for enhanced cleaning and inspection | Sheng-Chi Chin | 2018-02-13 |
| 9885952 | Systems and methods of EUV mask cleaning | Ching-Wei Shen, Kuan-Wen Lin | 2018-02-06 |