Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126644 | Pellicle for advanced lithography | Yu-Ching Lee, Ching-Fang Yu, Chun-Hung Lin, Ting-Hao Hsu, Ching-Hsiang Chang | 2018-11-13 |
| 10061193 | Focused radiation beam induced deposition | Hsun-Chuan Shih, Yuan-Chih Chu, Yueh-Hsun Li | 2018-08-28 |
| 9933699 | Pellicle aging estimation and particle removal from pellicle via acoustic waves | Yu-Ching Lee, Ching-Fang Yu, Chun-Hung Lin, Ting-Hao Hsu, Mark Chang | 2018-04-03 |
| 9915866 | Focused radiation beam induced deposition | Hsun-Chuan Shih, Yuan-Chih Chu, Yueh-Hsun Li | 2018-03-13 |
| 9910350 | Method for repairing a mask | Shang-Lun Tsai, Yuan-Chih Chu, Yueh-Hsun Li | 2018-03-06 |
| 9889477 | Method and apparatus for enhanced cleaning and inspection | Chi-Lun Lu | 2018-02-13 |
| 9870612 | Method for repairing a mask | Shinn-Sheng Yu, Anthony Yen, Wen-Chuan Wang | 2018-01-16 |