Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9933699 | Pellicle aging estimation and particle removal from pellicle via acoustic waves | Yu-Ching Lee, Ching-Fang Yu, Chun-Hung Lin, Sheng-Chi Chin, Ting-Hao Hsu | 2018-04-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9933699 | Pellicle aging estimation and particle removal from pellicle via acoustic waves | Yu-Ching Lee, Ching-Fang Yu, Chun-Hung Lin, Sheng-Chi Chin, Ting-Hao Hsu | 2018-04-03 |