Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126644 | Pellicle for advanced lithography | Yu-Ching Lee, Chun-Hung Lin, Ting-Hao Hsu, Ching-Hsiang Chang, Sheng-Chi Chin | 2018-11-13 |
| 9933699 | Pellicle aging estimation and particle removal from pellicle via acoustic waves | Yu-Ching Lee, Chun-Hung Lin, Sheng-Chi Chin, Ting-Hao Hsu, Mark Chang | 2018-04-03 |