Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162277 | Extreme ultraviolet lithography system with debris trapper on exhaust line | Jye-Fu Jeng, Shih-Chang Shih, Kun-Jin Wu, Guan-Heng Liu, Jen-Yang Chung +2 more | 2018-12-25 |
| 10067418 | Particle removal system and method thereof | Shu-Hao Chang, Chi-Lun Lu, Ming-Chin Chien, Jui-Ching Wu, Jeng-Horng Chen +2 more | 2018-09-04 |