Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869928 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Chih-Tsung Shih, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2018-01-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869928 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Chih-Tsung Shih, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2018-01-16 |