Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162258 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Wei-Jen Lo +3 more | 2018-12-25 |
| 10163738 | Structure and method for overlay marks | Hsien-Cheng Wang, Ming-Chang Wen, Chun-Kuang Chen | 2018-12-25 |