Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162258 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Hsin-Chang Lee, Yao-Ching Ku, Wei-Jen Lo +3 more | 2018-12-25 |
| 10036951 | Pellicle assembly and fabrication methods thereof | Pei-Cheng Hsu, Hsin-Chang Lee, Ta-Cheng Lien, Anthony Yen | 2018-07-31 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai +3 more | 2018-07-03 |
| 9982108 | Polyimide-containing layer and method for etching polyimide-containing layer | Chyi-Ming Leu | 2018-05-29 |
| 9897910 | Treating a capping layer of a mask | Pei-Cheng Hsu, Ta-Cheng Lien, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2018-02-20 |
| 9864270 | Pellicle and method for manufacturing the same | Jeng-Shin Ma, Tsiao-Chen Wu, Chi-Ming Yang, Chyi Shyuan Chern, Yun-Yue Lin | 2018-01-09 |