Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Jun-Lin Yeh +4 more | 2018-10-30 |
| 9864270 | Pellicle and method for manufacturing the same | Jeng-Shin Ma, Tsiao-Chen Wu, Chi-Ming Yang, Chih-Cheng Lin, Yun-Yue Lin | 2018-01-09 |