Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2018-10-30 |