Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2018-10-30 |
| 9865429 | Ion implantation with charge and direction control | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2018-01-09 |