Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9929045 | Defect inspection and repairing method and associated system and non-transitory computer readable medium | Chi-Ming Yang | 2018-03-27 |
| 9892931 | Semiconductor manufacturing apparatus and method thereof | Chi-Ming Yang | 2018-02-13 |
| 9892954 | Wafer processing system using multi-zone chuck | Chi-Ming Yang, You-Hua Chou, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2018-02-13 |
| 9865429 | Ion implantation with charge and direction control | Chih-Hong Hwang, Chun-Lin Chang, Chi-Ming Yang, Chin-Hsiang Lin | 2018-01-09 |
| 9859139 | 3D IC bump height metrology APC | Chi-Ming Yang | 2018-01-02 |