Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088761 | Lithography device and apparatus and method for lithography device | You-Hua Chou | 2018-10-02 |
| 9892954 | Wafer processing system using multi-zone chuck | Nai-Han Cheng, Chi-Ming Yang, You-Hua Chou, Chin-Hsiang Lin | 2018-02-13 |