| 10134674 |
Structure and method for improved stabilization of cobalt cap and/or cobalt liner in interconnects |
Benjamin D. Briggs, James J. Kelly, Koichi Motoyama, Michael Rizzolo, Theodorus E. Standaert |
2018-11-20 |
| 10128147 |
Interconnect structure |
Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang |
2018-11-13 |
| 10121661 |
Self aligned pattern formation post spacer etchback in tight pitch configurations |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more |
2018-11-06 |
| 10083864 |
Self aligned conductive lines with relaxed overlay |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more |
2018-09-25 |
| 10068846 |
Surface nitridation in metal interconnects |
Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang |
2018-09-04 |
| 9991156 |
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more |
2018-06-05 |
| 9972533 |
Aligning conductive vias with trenches |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more |
2018-05-15 |
| 9953864 |
Interconnect structure |
Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang |
2018-04-24 |
| 9934970 |
Self aligned pattern formation post spacer etchback in tight pitch configurations |
Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more |
2018-04-03 |
| 9911647 |
Self aligned conductive lines |
Sean D. Burns, Lawrence A. Clevenger, Anuja E. DeSilva, Nelson Felix, Sivananda K. Kanakasabapathy +3 more |
2018-03-06 |
| 9899317 |
Nitridization for semiconductor structures |
Lawrence A. Clevenger, Hosadurga Shobha, Terry A. Spooner, Wei Wang, Chi-Chao Yang |
2018-02-20 |
| 9859218 |
Selective surface modification of interconnect structures |
Raghuveer R. Patlolla, Cornelius Brown Peethala, Chih-Chao Yang |
2018-01-02 |
