Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10141188 | Resist having tuned interface hardmask layer for EUV exposure | Michael P. Belyansky, Ravi K. Bonam, Scott D. Halle | 2018-11-27 | $2,773,000 |
| 10134592 | Resist having tuned interface hardmask layer for EUV exposure | Michael P. Belyansky, Ravi K. Bonam, Scott D. Halle | 2018-11-20 | $2,951,000 |
| 10103022 | Alternating hardmasks for tight-pitch line formation | John C. Arnold, Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2018-10-16 | $2,674,000 |
| 9929012 | Resist having tuned interface hardmask layer for EUV exposure | Michael P. Belyansky, Ravi K. Bonam, Scott D. Halle | 2018-03-27 | $2,459,000 |
| 9911647 | Self aligned conductive lines | Sean D. Burns, Lawrence A. Clevenger, Nelson Felix, Sivananda K. Kanakasabapathy, Yann Mignot +3 more | 2018-03-06 | $2,330,000 |