| 10157789 |
Via formation using sidewall image transfer process to define lateral dimension |
Shyng-Tsong Chen, Cheng Chi, Sylvie Mignot, Yann Mignot, Hosadurga Shobha +3 more |
2018-12-18 |
| 10141339 |
Embedded security circuit formed by directed self-assembly |
Kangguo Cheng |
2018-11-27 |
| 10134762 |
Embedded security circuit formed by directed self-assembly |
Kangguo Cheng |
2018-11-20 |
| 10114921 |
Method and recording medium of reducing chemoepitaxy directed self-assembled defects |
Michael A. Guillorn, Kafai Lai, Ananthan Raghunathan, HsinYu Tsai |
2018-10-30 |
| 10103022 |
Alternating hardmasks for tight-pitch line formation |
John C. Arnold, Anuja E. DeSilva, Nelson Felix, Yann Mignot, Stuart A. Sieg |
2018-10-16 |
| 10090378 |
Efficient metal-insulator-metal capacitor |
Kisup Chung, Isabel C. Estrada-Raygoza, Hemanth Jagannathan, Yann Mignot, Hao Tang |
2018-10-02 |
| 10081740 |
Directed self-assembly |
Joy Cheng, Michael A. Guillorn, Jed W. Pitera, HsinYu Tsai |
2018-09-25 |
| 10084068 |
Self-aligned finFET formation |
Cheng Chi, Fee Li Lie, Ruilong Xie |
2018-09-25 |
| 10059820 |
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers |
Markus Brink, Joy Cheng, Alexander Friz, Michael A. Guillorn, Daniel P. Sanders +3 more |
2018-08-28 |
| 9984920 |
Design-aware pattern density control in directed self-assembly graphoepitaxy process |
Hsueh-Chung Chen, Cheng Chi, Lin Hu, Kafai Lai, Jed W. Pitera |
2018-05-29 |
| 9947548 |
Self-aligned single dummy fin cut with tight pitch |
Kangguo Cheng, Cheng Chi, Peng Xu |
2018-04-17 |
| 9929020 |
Method for fin formation with a self-aligned directed self-assembly process and cut-last scheme |
Cheng Chi, Fee Li Lie, Ruilong Xie |
2018-03-27 |
| 9917106 |
Embedded security circuit formed by directed self-assembly |
Kangguo Cheng |
2018-03-13 |
| 9911603 |
Pattern decomposition for directed self assembly patterns templated by sidewall image transfer |
Joy Cheng, Michael A. Guillorn, HsinYu Tsai |
2018-03-06 |
| 9884978 |
Directed self-assembly |
Joy Cheng, Michael A. Guillorn, Jed W. Pitera, HsinYu Tsai |
2018-02-06 |