Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103022 | Alternating hardmasks for tight-pitch line formation | Anuja E. DeSilva, Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2018-10-16 |
| 10032632 | Selective gas etching for self-aligned pattern transfer | Sean D. Burns, Yann Mignot, Yongan Xu | 2018-07-24 |