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Directed self-assembly |
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2018-09-25 |
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Semiconductor method of protecting wafer from bevel contamination |
An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin |
2018-09-11 |
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2018-09-04 |
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Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers |
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Fluoro-alcohol additives for orientation control of block copolymers |
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2018-08-07 |
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Pattern decomposition method for wiring patterns with chemoepitaxy based directed self assembly |
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2018-07-31 |
| 9911603 |
Pattern decomposition for directed self assembly patterns templated by sidewall image transfer |
Michael A. Guillorn, Chi-Chun Liu, HsinYu Tsai |
2018-03-06 |
| 9884978 |
Directed self-assembly |
Michael A. Guillorn, Chi-Chun Liu, Jed W. Pitera, HsinYu Tsai |
2018-02-06 |
| 9879152 |
Block copolymers for directed self-assembly applications |
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2018-01-30 |
