Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141188 | Resist having tuned interface hardmask layer for EUV exposure | Michael P. Belyansky, Anuja E. DeSilva, Scott D. Halle | 2018-11-27 |
| 10134592 | Resist having tuned interface hardmask layer for EUV exposure | Michael P. Belyansky, Anuja E. DeSilva, Scott D. Halle | 2018-11-20 |
| 9929012 | Resist having tuned interface hardmask layer for EUV exposure | Michael P. Belyansky, Anuja E. DeSilva, Scott D. Halle | 2018-03-27 |
| 9881762 | Integrated photoemission sources and scalable photoemission structures | — | 2018-01-30 |