Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121661 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Nelson Felix, Sivananda K. Kanakasabapathy, Christopher J. Penny +2 more | 2018-11-06 |
| 10083864 | Self aligned conductive lines with relaxed overlay | Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more | 2018-09-25 |
| 9991156 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more | 2018-06-05 |
| 9972533 | Aligning conductive vias with trenches | Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more | 2018-05-15 |
| 9934970 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Nelson Felix, Sivananda K. Kanakasabapathy, Christopher J. Penny +2 more | 2018-04-03 |