Issued Patents 2016
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9515089 | Bulk fin formation with vertical fin sidewall profile | Kangguo Cheng, Hong He, Sivananda K. Kanakasabapathy, Chiahsun Tseng | 2016-12-06 |
| 9508713 | Densely spaced fins for semiconductor fin field effect transistors | Hong He, Chiahsun Tseng, Chun-Chen Yeh | 2016-11-29 |
| 9484440 | Methods for forming FinFETs with non-merged epitaxial fin extensions | Hong He, Shogo Mochizuki, Chiahsun Tseng, Chun-Chen Yeh | 2016-11-01 |
| 9406746 | Work function metal fill for replacement gate fin field effect transistor process | Hong He, Junli Wang, Yongan Xu | 2016-08-02 |
| 9396957 | Non-lithographic line pattern formation | Chiahsun Tseng, David V. Horak, Chun-Chen Yeh | 2016-07-19 |
| 9391155 | Gate structure integration scheme for fin field effect transistors | Hong He, Chiahsun Tseng, Chun-Chen Yeh | 2016-07-12 |
| 9379218 | Fin formation in fin field effect transistors | Kangguo Cheng, Bruce B. Doris, Hong He, Ali Khakifirooz | 2016-06-28 |
| 9373580 | Dual hard mask lithography process | John C. Arnold, Sean D. Burns, Steven J. Holmes, David V. Horak, Muthumanickam Sankarapandian | 2016-06-21 |
| 9330962 | Non-lithographic hole pattern formation | Chiahsun Tseng, David V. Horak, Chun-Chen Yeh | 2016-05-03 |
| 9330965 | Double self aligned via patterning | Hsueh-Chung Chen, Yongan Xu, Ailian Zhao | 2016-05-03 |
| 9324830 | Self-aligned contact process enabled by low temperature | Hong He, Chiahsun Tseng, Chun-Chen Yeh | 2016-04-26 |
| 9293345 | Sidewall image transfer with a spin-on hardmask | Hong He, Chiahsun Tseng, Chun-Chen Yeh | 2016-03-22 |
| 9257334 | Double self-aligned via patterning | Hsueh-Chung Chen, Yongan Xu, Ailian Zhao | 2016-02-09 |
| 9252022 | Patterning assist feature to mitigate reactive ion etch microloading effect | Daniel James Dechene, Geng Han, Scott M. Mansfield, Stuart A. Sieg | 2016-02-02 |
| 9252243 | Gate structure integration scheme for fin field effect transistors | Hong He, Chiahsun Tseng, Chun-Chen Yeh | 2016-02-02 |