Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9252022 | Patterning assist feature to mitigate reactive ion etch microloading effect | Geng Han, Scott M. Mansfield, Stuart A. Sieg, Yunpeng Yin | 2016-02-02 | $567,000 |