Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9471743 | Predicting process fail limits | Geng Han, Ramya Viswanathan | 2016-10-18 |
| 9252022 | Patterning assist feature to mitigate reactive ion etch microloading effect | Daniel James Dechene, Geng Han, Stuart A. Sieg, Yunpeng Yin | 2016-02-02 |