Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373580 | Dual hard mask lithography process | Sean D. Burns, Steven J. Holmes, David V. Horak, Muthumanickam Sankarapandian, Yunpeng Yin | 2016-06-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373580 | Dual hard mask lithography process | Sean D. Burns, Steven J. Holmes, David V. Horak, Muthumanickam Sankarapandian, Yunpeng Yin | 2016-06-21 |