Issued Patents 2011
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070879 | Apparatus and method for hybrid chemical processing | Ling Chen, Vincent Ku, Dien-Yeh Wu, Hua Chung | 2011-12-06 |
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2011-11-22 |
| 8043933 | Integration sequences with top surface profile modification | Chien-Teh Kao, Xinliang Lu, Zhenbin Ge, Hoiman Raymond Hung, Nitin K. Ingle | 2011-10-25 |
| 7994002 | Method and apparatus for trench and via profile modification | Chien-Teh Kao, Xinliang Lu, Zhenbin Ge | 2011-08-09 |
| 7977246 | Thermal annealing method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere | Haichun Yang, Chien-Teh Kao, Xinliang Lu | 2011-07-12 |
| 7939422 | Methods of thin film process | Nitin K. Ingle, Jing Tang, Yi Zheng, Zheng Yuan, Zhenbin Ge +4 more | 2011-05-10 |
| 7923069 | Multi-station deposition apparatus and method | Lawrence Chung-Lai Lei, Walter Glenn | 2011-04-12 |
| 7910853 | Direct real-time monitoring and feedback control of RF plasma output for wafer processing | David T. Or, Yu-Tzu Chang, William Kuang, Joel M. Huston, Chien-Teh Kao | 2011-03-22 |
| 7910165 | Ruthenium layer formation for copper film deposition | Seshadri Ganguli, Kavita Shah, Nirmaya Maity | 2011-03-22 |
| 7871926 | Methods and systems for forming at least one dielectric layer | Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Derek R. Witty, Hichem M'Saad +3 more | 2011-01-18 |
| 7867789 | Contact clean by remote plasma and repair of silicide surface | Xinliang Lu, Chien-Teh Kao, Chiukin Lai | 2011-01-11 |