Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Jenny Lin +3 more | 2011-11-22 |
| 7910165 | Ruthenium layer formation for copper film deposition | Kavita Shah, Nirmaya Maity, Mei Chang | 2011-03-22 |