Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070879 | Apparatus and method for hybrid chemical processing | Ling Chen, Vincent Ku, Mei Chang, Dien-Yeh Wu | 2011-12-06 |
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more | 2011-11-22 |
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Ken Kaung Lai +1 more | 2011-09-27 |
| 7892602 | Cyclical deposition of refractory metal silicon nitride | Ling Chen, Barry Chin | 2011-02-22 |
| 7867896 | Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor | Wei Cao, Vincent Ku, Ling Chen | 2011-01-11 |