Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Hua Chung, Ken Kaung Lai +1 more | 2011-09-27 |
| 7867914 | System and method for forming an integrated barrier layer | Michael Yang, Hui Zhang | 2011-01-11 |