Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2011-09-27 |
| 7923069 | Multi-station deposition apparatus and method | Mei Chang, Walter Glenn | 2011-04-12 |
| 7897525 | Methods and systems of transferring, docking and processing substrates | Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2011-03-01 |