Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2011-09-27 |
| 7897525 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2011-03-01 |
| 7879151 | Mask etch processing apparatus | Khiem K. Nguyen, Peter Satitpunwaycha | 2011-02-01 |