Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070879 | Apparatus and method for hybrid chemical processing | Ling Chen, Mei Chang, Dien-Yeh Wu, Hua Chung | 2011-12-06 |
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more | 2011-11-22 |
| 7867896 | Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor | Wei Cao, Hua Chung, Ling Chen | 2011-01-11 |