Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867896 | Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor | Hua Chung, Vincent Ku, Ling Chen | 2011-01-11 |
WC
Wei Cao
Overall (2011): #133,548 of 364,097Top 40%
1
Patents 2011