Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989339 | Vapor deposition processes for tantalum carbide nitride materials | Haichun Yang, Schubert S. Chu | 2011-08-02 |
| 7910165 | Ruthenium layer formation for copper film deposition | Seshadri Ganguli, Nirmaya Maity, Mei Chang | 2011-03-22 |