Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043933 | Integration sequences with top surface profile modification | Chien-Teh Kao, Xinliang Lu, Zhenbin Ge, Mei Chang, Hoiman Raymond Hung | 2011-10-25 |
| 8012887 | Precursor addition to silicon oxide CVD for improved low temperature gapfill | Shankar Venkataraman, Hiroshi Hamana, Manuel A. Hernandez, Paul Edward Gee | 2011-09-06 |
| 7939422 | Methods of thin film process | Jing Tang, Yi Zheng, Zheng Yuan, Zhenbin Ge, Xinliang Lu +4 more | 2011-05-10 |
| 7935643 | Stress management for tensile films | Jingmei Liang, Anjana M. Patel, Shankar Venkataraman | 2011-05-03 |