Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967913 | Remote plasma clean process with cycled high and low pressure clean steps | Zhong Qiang Hua, Sanjay Kamath, Young S. Lee, Ellie Yieh, Hien Minh Le +1 more | 2011-06-28 |
| 7935643 | Stress management for tensile films | Jingmei Liang, Nitin K. Ingle, Shankar Venkataraman | 2011-05-03 |