Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967913 | Remote plasma clean process with cycled high and low pressure clean steps | Zhong Qiang Hua, Young S. Lee, Ellie Yieh, Hien Minh Le, Anjana M. Patel +1 more | 2011-06-28 |