Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022377 | Method and apparatus for excimer curing | Dmitry Lubomirsky, Muhammad M. Rasheed | 2011-09-20 |
| 7967913 | Remote plasma clean process with cycled high and low pressure clean steps | Zhong Qiang Hua, Sanjay Kamath, Young S. Lee, Hien Minh Le, Anjana M. Patel +1 more | 2011-06-28 |
| 7943531 | Methods for forming a silicon oxide layer over a substrate | Srinivas D. Nemani, Abhijit Basu Mallick | 2011-05-17 |
| 7867923 | High quality silicon oxide films by remote plasma CVD from disilane precursors | Abhijit Basu Mallick, Srinivas D. Nemani | 2011-01-11 |