Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022377 | Method and apparatus for excimer curing | Dmitry Lubomirsky, Ellie Yieh | 2011-09-20 |
| 7964040 | Multi-port pumping system for substrate processing chambers | Dmitry Lubomirsky, James Santosa | 2011-06-21 |